Axetris is offering OEM Mass Flow Meter (MFM) and Controllers (MFC) for gases with outstanding value to the customer. The proprietary Platinum based MEMS chip technology guarantees excellent accuracy and repeatability in com-bination with a high speed and an extended dynamic range. This advantages of the platinum based MEMS technology combined with smart software processing along with robust packaging make the Axetris Mass Flow Meter and Controllers an ideal choice for demanding OEM applications. 

The Axetris mass flow technology is used by many leading companies in the field of Gas chromatography, Leak testing, Thermo analytics, Mass spec-troscopy, Thin film deposition, Plasma Engineering and more.

A broad range of standard modules and products are available to allow OEM customer an easy and seamless integration of the leading mass flow controller technology into their products and thereby benefitting form an performance increase due to the benefits of the platinum MEMS technology. 

Currently Axetris offers the following product variants:
　

• Ultra compact mass flow meter and controller modules wit analog 0...5V and digital interfaces (RS 232 TTL, RS 232 EIA, RS 485)
• Compact mass flow meter and controllers wit protective housing and analog 0…5 V or 4…20 mA and digital interfaces
• Standard mass flow gas mixer and splitters with up to 4 channels
• Custom gas management systems

Specific optimised calibrations are available for a wide variety of applications for example for Leak testing, Gas Chromatography carrier gas control, Bioreactor control, CO2 Laser control and for Thin Film applications

Key Features:
　

• Platinum based MEMS technology
• High accuracy and repeatability
• Ultra compact size
• Ultra-fast response time
• High dynamic range
• Flow range zooming (optional)
• Full temperature compensation (0 to 50°C)
• Multi-gas/range capability, up to 8 calibration curves
• Anemometric measurement principle
• Broad range of solutions