Axetris is offering OEM Mass Flow
Meter (MFM) and Controllers (MFC)
for gases with outstanding value to
the customer. The proprietary
Platinum based MEMS chip technology
guarantees excellent accuracy and
repeatability in com-bination with a
high speed and an extended dynamic
range. This advantages of the
platinum based MEMS technology
combined with smart software
processing along with robust
packaging make the Axetris Mass Flow
Meter and Controllers an ideal
choice for demanding OEM
applications.
The Axetris mass flow technology is
used by many leading companies in
the field of Gas chromatography,
Leak testing, Thermo analytics, Mass
spec-troscopy, Thin film deposition,
Plasma Engineering and more.
A broad range of standard modules
and products are available to allow
OEM customer an easy and seamless
integration of the leading mass flow
controller technology into their
products and thereby benefitting
form an performance increase due to
the benefits of the platinum MEMS
technology.
Currently Axetris offers the
following product variants:
- Ultra compact mass flow
meter and controller modules wit
analog 0...5V and digital
interfaces (RS 232 TTL, RS 232
EIA, RS 485)
- Compact mass flow meter and
controllers wit protective
housing and analog 0…5 V or 4…20
mA and digital interfaces
- Standard mass flow gas mixer
and splitters with up to 4
channels
- Custom gas management
systems
Specific optimised calibrations are
available for a wide variety of
applications for example for Leak
testing, Gas Chromatography carrier
gas control, Bioreactor control, CO2
Laser control and for Thin Film
applications
Key Features:
- Platinum based MEMS
technology
- High accuracy and
repeatability
- Ultra compact size
- Ultra-fast response time
- High dynamic range
- Flow range zooming
(optional)
- Full temperature
compensation (0 to 50°C)
- Multi-gas/range capability,
up to 8 calibration curves
- Anemometric measurement
principle
- Broad range of solutions
